Manufacturing method of organic thin-film transistors and...

Details Manufacturing method of organic thin-film transistors and... Manufacturing method of organic thin-film transistors and...

2007-01-19

2009-12-22

Ho, Tu-Tu V (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Organic semiconductor material

C257SE21114, C257SE21153, C257SE21174, C257S192000, C438S099000, C438S497000, C118S073000

Reexamination Certificate

active

07635860

ABSTRACT:
To increase productivity of organic thin-film transistors, in an organic thin-film transistor manufacturing equipment, a liquid containing at least either one of a wiring material and a semiconductor material is coated on a substrate to form a number of organic thin-film transistors. Substrate carrying means carry the substrate. The substrate is heated by a first heating means, and the temperature of the substrate is controlled by a controller. The liquid containing at least either one of the wiring material and the semiconductor material is heated by a second heating means, and the temperature of this liquid is controlled also by the controller.

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