Optical: systems and elements – Single channel simultaneously to or from plural channels – By surface composed of lenticular elements
Reexamination Certificate
2006-02-07
2006-02-07
Epps, Georgia (Department: 2873)
Optical: systems and elements
Single channel simultaneously to or from plural channels
By surface composed of lenticular elements
C359S620000, C065S037000, C264S001320
Reexamination Certificate
active
06995915
ABSTRACT:
The present invention intends to provide a manufacturing method of a heat resistant micro-lens. The manufacturing method includes forming on a substrate an inorganic film having the optical transparency; forming, at positions that are on the inorganic film and correspond to lens formation positions, a resist films; etching a portion where the resist films are not formed of the inorganic film; removing the resist films that remain; and irradiating inert gas ions to the inorganic film from which the resist films are removed and that is patterned according to the etching.
REFERENCES:
patent: 5734190 (1998-03-01), Hawkins et al.
Imai Tsutomu
Kai Seiji
Matsui Ryoji
Takegawa Kazuyuki
Tanaka Yuko
Epps Georgia
Harrington Alicia M
Oliff & Berridg,e PLC
Sanyo Electric Co,. Ltd.
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