Stock material or miscellaneous articles – Composite – Of metal
Reexamination Certificate
2011-04-26
2011-04-26
Lam, Cathy (Department: 1784)
Stock material or miscellaneous articles
Composite
Of metal
C428S209000, C174S126100, C174S126400, C174S257000, C174S258000, C257S784000
Reexamination Certificate
active
07931973
ABSTRACT:
Disclosed is a manufacturing method of metal structure in multi-layer substrate and structure thereof. The manufacturing method of the present invention comprises following steps: coating at least one photoresist layer on a surface of a dielectric layer, and then exposing the photoresist dielectric layer to define a predetermined position of the metal structure; therefore, removing the photoresist layer at the predetermined position and forming the metal structure at the predetermined position before forming at least one top-cover metal layer on a surface of the metal structure. The present invention can form a cover metal layer covering over the top surface and the two side surfaces, even the under surface of the metal structure, by one single photomask. Moreover, a finer metal structure with higher reliability can be manufactured. Furthermore, a metal structure can be used as a coaxial structure is also realized.
REFERENCES:
patent: 3057952 (1962-10-01), Gordon
patent: 3168617 (1965-02-01), Richter
patent: 3215574 (1965-11-01), Korb
patent: 4085502 (1978-04-01), Ostman et al.
patent: 5158657 (1992-10-01), Kadokura
patent: 5213840 (1993-05-01), Retallick et al.
patent: 5246564 (1993-09-01), Tamiya et al.
patent: 5281765 (1994-01-01), Iura et al.
patent: 5458763 (1995-10-01), Kobayashi et al.
patent: 5483021 (1996-01-01), Saen et al.
patent: 5485352 (1996-01-01), Shibuya et al.
patent: 5527997 (1996-06-01), Saen et al.
patent: 5666717 (1997-09-01), Matsumoto et al.
patent: 6100582 (2000-08-01), Omote et al.
patent: 6198284 (2001-03-01), Doty
patent: 6426143 (2002-07-01), Voss et al.
patent: 6518503 (2003-02-01), Yamanobe et al.
patent: 7087438 (2006-08-01), Kasko et al.
patent: 1461181 (2003-12-01), None
patent: 1494120 (2004-05-01), None
patent: 1505123 (2004-06-01), None
patent: 2741319 (2005-11-01), None
patent: 1744799 (2006-03-01), None
patent: 1940599 (2007-04-01), None
patent: 1957298 (2007-05-01), None
patent: 0215557 (1987-03-01), None
patent: 1-205495 (1989-08-01), None
patent: 2000-340901 (2000-12-01), None
patent: 2006/134399 (2006-12-01), None
patent: 2007/037553 (2007-04-01), None
Lam Cathy
Princo Corp.
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