Manufacturing method of electro-optical apparatus substrate,...

Details Manufacturing method of electro-optical apparatus substrate,... Manufacturing method of electro-optical apparatus substrate,...

2007-05-29

2007-05-29

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S347000, C359S315000

Reexamination Certificate

active

10980750

ABSTRACT:
A manufacturing process of an electro-optical apparatus substrate is provided wherein a substrate is coated with a photosensitive resin. A first exposure process is executed with a first reticle to form an uneven portion on the substrate. Subsequently, a second exposure process is executed with a second reticle to remove all the photosensitive resin on portions other than the uneven portion. After the second exposure process, the substrate is developed so as to form an underlying film having an uneven portion.

REFERENCES:
patent: 2003/0209710 (2003-11-01), Yamazaki et al.
patent: 2004/0012966 (2004-01-01), Takasaki et al.
patent: 2006/0001961 (2006-01-01), Gibilini
patent: 2000-171793 (2000-06-01), None
patent: 2000-171794 (2000-06-01), None
patent: 2001-290014 (2001-10-01), None
patent: 2003-075987 (2003-03-01), None
patent: 2003-302740 (2003-10-01), None
patent: 2003-302741 (2003-10-01), None
patent: 2003-320742 (2003-10-01), None

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