Manufacturing method of ceramic device using mixture with...

Details Manufacturing method of ceramic device using mixture with... Manufacturing method of ceramic device using mixture with...

2006-08-29

2006-08-29

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S847000, C029SDIG016, C430S317000, C430S318000, C216S027000, C216S041000, C310S364000, C310S366000

Reexamination Certificate

active

07096547

ABSTRACT:
A manufacturing method for a ceramic device using a mixture with a photosensitive resin includes: providing a ceramic substrate, forming a lower electrode on the substrate using a mixture of a photosensitive resin and metal, masking and exposing the lower electrode to pattern the lower electrode, forming a piezoelectric/electrostrictive layer on the lower electrode using a mixture of photosensitive resin and piezoelectric/electrostrictive ceramic, masking and exposing the piezoelectric/electrostrictive layer to pattern the piezoelectric/electrostrictive layer, forming an upper electrode on the piezoelectric/electrostrictive layer using the mixture of photosensitive resin and metal, and exposing the upper electrode to pattern the upper electrode.

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patent: 6334244 (2002-01-01), Hashizume
patent: 62-137856 (1987-06-01), None
Kline-Schoder et al., “Physical Vapor Deposition of Multilayer Lead-Zirconate-Titanate Films for Ultrasonic Transducer Fabricatioin”, 1997 IEEE Ultrasonics Symposium, vol. 2, Oct 1997, pp. 937-942.

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