Manufacturing method of an optical waveguide

Optical waveguides – Integrated optical circuit

Reexamination Certificate

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C385S047000

Reexamination Certificate

active

11228560

ABSTRACT:
A manufacturing method of an optical waveguide is disclosed, the optical waveguide transmitting an optical signal between a luminous source and an optical receiver. The optical waveguide is structured by forming a lower clad layer, a core section, and an upper clad layer one by one on a substrate; by forming a first slot and a second slot each dividing the core section from the side of the upper clad layer that is not connected to the substrate; and by forming a metal film in the first and second slots such that a first mirror and a second mirror are formed.

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patent: 2005/0163416 (2005-07-01), Yamada et al.
patent: 2000098153 (2000-04-01), None
patent: 2000-304953 (2000-11-01), None

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