Coating processes – Electrical product produced – Electron emissive or suppressive
Reexamination Certificate
2007-03-13
2007-03-13
Meeks, Timothy (Department: 1762)
Coating processes
Electrical product produced
Electron emissive or suppressive
Reexamination Certificate
active
10774583
ABSTRACT:
This invention provides an electron source manufacturing apparatus which can be easily downsized and operated. The electron source manufacturing apparatus includes a support member for supporting a substrate (10) having a conductor (11), a vessel (12) which has a gas inlet port (15) and a gas exhaust port (16) and covers a partial region of the surface of the substrate (10); a gas inlet unit (24) connected to the gas inlet port (15) to introduce gas into the vessel, an exhaust unit (26) connected to the gas exhaust port to evacuate the interior of the vessel, and a voltage application unit (32) for applying a voltage to the conductor.
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Jindai Kazuhiro
Kamio Masaru
Kawasaki Hideshi
Oda Hitoshi
Sato Yasue
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Lin Jimmy
Meeks Timothy
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