Manufacturing method of actuator device and liquid jet...

Details Manufacturing method of actuator device and liquid jet... Manufacturing method of actuator device and liquid jet...

2004-11-24

2008-08-12

Dougherty, Thomas M (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

Reexamination Certificate

active

07411339

ABSTRACT:
A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.

REFERENCES:
patent: 6354836 (2002-03-01), Panzera et al.
patent: 2003/0063165 (2003-04-01), Shimada
patent: 11-204849 (1999-07-01), None
patent: 2002-29840 (2002-01-01), None

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