Manufacturing method of a light emitting device including...

Details Manufacturing method of a light emitting device including... Manufacturing method of a light emitting device including...

2007-05-01

2007-05-01

Brewster, William M. (Department: 2823)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Packaging or treatment of packaged semiconductor

C438S149000, C438S680000, C257SE33002

Reexamination Certificate

active

10894434

ABSTRACT:
The present invention provides an active matrix substrate which can be fabricated at a lower cost and a light emitting device having a large display area fabricated by a vapor deposition system which makes a film with uniform thickness for a large substrate. According to the invention, an organic light-emitting device can be fabricated by performing vapor deposition toward a large substrate provided with a pixel portion (and a driver circuit) including an n-channel TFT having a amorphous silicon film, semi-amorphous semiconductor film or an organic semiconductor film as an active layer.

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