Manufacturing method for variable resistive element

Details Manufacturing method for variable resistive element Manufacturing method for variable resistive element

2006-06-06

2010-06-29

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S621000, C029S829000, C029S874000, C338S020000

Reexamination Certificate

active

07743488

ABSTRACT:
In the case where a variable resistive element, which is made of a variable resistor provided between a first and second electrodes, and of which the electrical resistance varies by applying a voltage pulse between the two electrodes, is applied to a resistance nonvolatile memory, there is a range of the resistance value of the variable resistive element in a low resistance state where the nonvolatile memory can operate normally. In the conventional manufacturing method the resistance value of the variable resistive element is too low, therefore, it can not be controlled within a desired range of the resistance value. A step of carrying out of a reduction process is provided at any point after the step of forming a variable resistor material as a film, it has thereby become possible to increase the resistance value of the variable resistive element, which is too low in the conventional method.

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Liu et al.,Electric-pulse-induced reversible resistance change effect in magnetoresistive films, Applied Physics Letters, vol. 76, No. 19, May 8, 2000, pp. 2749-2751.

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