Manufacturing method for piezoelectric body, piezoelectric...

Incremental printing of symbolic information – Ink jet – Ejector mechanism

Reexamination Certificate

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C029S025350

Reexamination Certificate

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07874648

ABSTRACT:
A method of manufacturing a piezoelectric body, formed from a film made of an ABO3perovskite oxide crystal epitaxially grown on a substrate, includes forming a film containing an AOxcrystal by using an oxide containing an A element and a B element by heating the substrate to a temperature which is equal to or higher than a temperature at which the AOxcrystal is formed, and which is lower than a temperature at which the ABO3perovskite oxide crystal is formed and changing the film containing the AOxcrystal into a film made of the ABO3perovskite oxide crystal by heating the substrate to a temperature which exceeds a temperature at which the AOxcrystal can be present, and which is equal to or higher than a temperature at which the ABO3perovskite oxide crystal is formed.

REFERENCES:
patent: 7120978 (2006-10-01), Wasa et al.
patent: 7144101 (2006-12-01), Ifuku et al.
patent: 7591543 (2009-09-01), Aoki et al.
patent: 2008/0012908 (2008-01-01), Takeda et al.
patent: 2008/0012910 (2008-01-01), Matsuda et al.
patent: 6-171939 (1994-06-01), None

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