Semiconductor device manufacturing: process – Having organic semiconductive component
Reexamination Certificate
2005-04-14
2009-12-15
Menz, Douglas M (Department: 2891)
Semiconductor device manufacturing: process
Having organic semiconductive component
C257SE51018, C427S066000, C118S731000
Reexamination Certificate
active
07632704
ABSTRACT:
Provided are a method of effectively manufacturing an organic EL element with high quality and an apparatus therefor. A surface to be processed of a substrate in an upper electrode forming step is held downward, and the surface to be processed of the substrate in a passivation layer forming step is held upward.
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Machine Translation of JP 10261487 A.
Machine Translation of JP 2002117973 A.
Machine Translation of JP 08111285 A.
Kanai Masahiro
Sugai Hiroshi
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Menz Douglas M
Such Matthew W
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