Manufacturing method for non-active electrically structures...

Details Manufacturing method for non-active electrically structures... Manufacturing method for non-active electrically structures...

2006-02-21

2006-02-21

Nelms, David (Department: 2818)

Semiconductor device manufacturing: process

Making device array and selectively interconnecting

With electrical circuit layout

C257S368000

Reexamination Certificate

active

07001800

ABSTRACT:
A method for manufacturing electrically non-active structures for an electronic circuit integrated on a semiconductor substrate is provided, with the electronic circuit including first and second electrically active structures. The method includes inserting the electrically non-active structures in the electronic circuit to make uniform a surface above the semiconductor substrate. The inserting includes identifying, among the electrically non-active structures, a first group of electrically non-active structures to be adjacent the first and second electrically active structures, and identifying, among the electrically non-active structures, a second group of electrically non-active structures not adjacent to the first and second electrically active structures. The method further includes defining, on the semiconductor substrate, the first and second groups of electrically non-active structures through different photolithographic steps.

REFERENCES:
patent: 5885856 (1999-03-01), Gilbert et al.
patent: 6262435 (2001-07-01), Plat et al.
patent: 6384464 (2002-05-01), Shin
patent: 6448630 (2002-09-01), Komori
patent: 6521969 (2003-02-01), Tomita
patent: 2001/0004122 (2001-06-01), Ito
patent: 2002/0061608 (2002-05-01), Kuroda et al.
patent: 03/019641 (2003-03-01), None

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