Semiconductor device manufacturing: process – Having magnetic or ferroelectric component
Patent
1995-03-14
1997-04-08
Niebling, John
Semiconductor device manufacturing: process
Having magnetic or ferroelectric component
360113, 360125, 338 13, 324249, 324252, 330 62, 438 17, H01L 2166
Patent
active
056187386
ABSTRACT:
A method of manufacturing a magnetoresistance element that can accurately sort out truely defective products from apparently defective products due to the manufacturing processes. Manufacturing processes for MR elements includes a MR element formation process, a magnetic field application process and an electric inspection process. In the magnetic field process, the magnetic field application is limited to a range within 75.degree. to the longitudinal direction of a MR element pattern. By performing the magnetic field application process before the electric inspection process, the anisotropic magnetic field due to a shape magnetic anisotropy of the MR element can be aligned almost in a fixed direction, defective products due to the manufacturing processes can exactly be sorted out from the apparently defective products in the electric inspection process, so that the yield rate can be improved.
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"With Ferrite" by TDK Corp in the Nikkan Kogyo Shimbun, Jan. 25, 1986.
Ao Kenichi
Murata Minoru
Noguchi Hiroki
Uenoyama Hirofumi
Yoshino Yoshimi
Niebling John
Nippondenso Co. Ltd.
Pham Long
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