Metal working – Piezoelectric device making
Patent
1996-01-16
1997-01-07
Vo, Peter
Metal working
Piezoelectric device making
298901, 310333, 347 71, H01L 4122
Patent
active
055904513
ABSTRACT:
A manufacturing method for an ink jet printer head, includes the steps of cutting a plurality of channels for forming a plurality of ink chambers, on the upper surface of a substrate including at least one piezoelectric member polarized across its thickness; adsorbing Sn on the upper surface of the substrate including the inner surfaces of the channels; forming a pattern resist film on the upper surface of the substrate on which the Sn has been absorbed adsorbing Pd as a catalyst core for electroless plating on the electrode forming portions and the wiring pattern forming portions; separating the pattern resist film; immersing the substrate from which the pattern resist film has been separated into a plating liquid to deposit plating on the electrode forming portions and the wiring pattern forming portions; and mounting on the substrate a top plate for covering upper openings of the channels and a nozzle plate for covering front openings of the channels to form the above ink chambers.
REFERENCES:
patent: 5301404 (1994-04-01), Ochiai et al.
patent: 5311218 (1994-05-01), Ochiai et al.
patent: 5311219 (1994-05-01), Ochiai et al.
patent: 5327627 (1994-07-01), Ochiai et al.
Katsuumi Kazushige
Miyazawa Toshio
Tsukamoto Toshihiro
Kabushiki Kaisha TEC
Toshiba-Emi Limited
Vo Peter
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