Metal working – Piezoelectric device making
Patent
1996-01-30
1997-07-22
Vo, Peter
Metal working
Piezoelectric device making
298901, 310333, 347 71, H01L 4122
Patent
active
056493460
ABSTRACT:
A manufacturing method for an ink jet printer head, includes the steps of: cutting a plurality of channels for forming a plurality of ink chambers, on the upper surface of a substrate composed of a plurality of layers including at least one piezoelectric member polarized across its thickness; forming a pattern resist film covering a portion of the upper surface of the substrate except electrode forming portions on the inner surfaces of the channels and wiring pattern forming portions on the substrate; performing a process for adsorption of Pd on the electrode forming portions and the wiring pattern forming portions after forming the pattern resist film, for example, by performing a sensitizing process of adsorbing Sn on the substrate and next substituting Pd for the Sn, or by performing a catalyzing process of adsorbing a complex compound of Pd on the substrate and next performing an accelerating process of metallizing the complex compound of Pd; separating the pattern resist film; immersing the substrate from which the pattern resist film has been separated into a plating liquid for forming electrodes and wiring patterns; and mounting on the substrate a top plate and a nozzle plate to form the above ink chambers.
REFERENCES:
patent: 5301404 (1994-04-01), Ochiai et al.
patent: 5311218 (1994-05-01), Ochiai et al.
patent: 5311219 (1994-05-01), Ochiai et al.
patent: 5327627 (1994-07-01), Ochiai et al.
Katsuumi Kazushige
Miyazawa Toshio
Tsukamoto Toshihilo
Kabushiki Kaisha TEC
Toshiba-Emi Limited
Vo Peter
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