Manufacturing method for forming a write head top pole using...

Details Manufacturing method for forming a write head top pole using... Manufacturing method for forming a write head top pole using...

2006-07-25

2006-07-25

Ackun, Jr., Jacob K. (Department: 3723)

Abrading

Abrading process

C216S022000, C216S038000

Reexamination Certificate

active

07081041

ABSTRACT:
A method for forming a write head top pole using chemical mechanical polishing with a diamond-like-carbon (DLC) polishing stop layer is disclosed. The method for providing a top pole of a write head includes forming a P2pole tip, depositing a P2filling layer to a P2target thickness, wherein the P2filling layer around the P2pole tip is filled to a P2target thickness while the P2filling layer creates a topography above the P2pole tip, depositing a DLC polishing stop layer over the P2target thickness filling layer, and chemically mechanically polishing (CMP) any topography above the stop layer-covered P2target thickness filling layer to the stop layer using a selective slurry.

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