Manufacturing method for an ink jet recording head

Details Manufacturing method for an ink jet recording head Manufacturing method for an ink jet recording head

2005-03-08

2005-03-08

Kim, Paul D (Department: 3729)

Metal working

Piezoelectric device making

C029S890100, C219S212000, C219S216000, C347S054000, C347S068000, C347S069000, C347S070000, C347S071000, C347S072000, C156S250000, C156S257000, C156S272800

Reexamination Certificate

active

06862783

ABSTRACT:
An ink jet recording head manufacturing method is provided comprising: forming a peeling layer wherein peeling is induced by light irradiation on a base plate exhibiting light-transmissivity; forming a common electrode film on the peeling layer; forming a plurality of piezoelectric elements, forming a reservoir piece including a lid structure that accommodates one or more piezoelectric elements in an interior which forms an ink reservoir; irradiating the peeling layer with prescribed light from the base plate side to induce peeling; peeling the base plate away; and bonding a pressure chamber plate provided with a plurality of pressure chambers to the common electrode film separated from the base plate so that the pressure chambers are sealed.

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A new device for multifunctional dosage of liquids by a free jet; Hey, N.; Freygang, M.; Gruhler, H.; Sandmaier, H.; Zengerle, R Micro Electro Mechanical Systems, Jan. 25-29, 1998; pp.: 429-431.*
Notice of Reason for Refusal, Japanese Patent Office, Patent Application No. HEI 9 (1997)-267206.

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