Metal working – Piezoelectric device making
Reexamination Certificate
2010-08-16
2011-10-11
Tugbang, A. Dexter (Department: 3729)
Metal working
Piezoelectric device making
C029S852000, C310S344000, C310S366000
Reexamination Certificate
active
08032997
ABSTRACT:
A process of manufacturing a piezoelectric vibrator comprises a base substrate; a lid substrate in which cavity recesses are formed and which is bonded to the base substrate in such a state that the recesses face the base substrate; a piezoelectric vibration member bonded to the upper face of the base substrate in such a state that it is housed in the cavity formed of the recess between the base substrate and the lid substrate; an external electrode formed on the lower face of the base substrate; a through- electrode formed in and through the base substrate and electrically connected with the external electrode with keeping the airtightness inside the cavity; and a routing electrode formed on the upper face of the base substrate to electrically connect the through-electrode to the bonded piezoelectric vibration member; wherein the through-electrode is formed in the base substrate by utilizing an electroconductive tack member having a tabular basis part and a core part extending from the basis part toward a direction perpendicular from a surface of the tabular basis part, where the core part is inserted into a through-hole formed in the base substrate and the basis part is removed by polishing the base substrate.
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International Search Report for International Application No. PCT/JP2008/069850, dated Jan. 27, 2009, 2 pages.
Aratake Kiyoshi
Fukuda Junya
Numata Masashi
Onitsuka Osamu
Sugama Kazuyoshi
Brinks Hofer Gilson & Lione
Seiko Instruments Inc.
Tugbang A. Dexter
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