Manufacturing method for a circuit pattern, a thin film...

Details Manufacturing method for a circuit pattern, a thin film... Manufacturing method for a circuit pattern, a thin film...

2007-03-01

2010-10-26

Garber, Charles D (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C257SE21174, C257SE21582, C428S432000, C428S702000

Reexamination Certificate

active

07820465

ABSTRACT:
A circuit pattern is formed by following steps: forming a light-blocking mask over a major surface of a light-transmitting substrate, forming a first film in a first region over the substrate and the mask, forming a photocatalytic film in at least a part of the first region over the first film, changing wettability of the first film in a second region which is in the first region, being in contact with the photocatalytic film, and not overlapping the mask, by light irradiation from a back surface opposite to the major surface of the substrate, removing the photocatalytic film, and forming a composition including a pattern forming material in the second region.

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