Manufacturing method and manufacturing apparatus of magnetic...

Details Manufacturing method and manufacturing apparatus of magnetic... Manufacturing method and manufacturing apparatus of magnetic...

2004-07-28

2008-12-30

Olsen, Allan (Department: 1792)

Etching a substrate: processes

Forming or treating article containing magnetically...

C216S041000

Reexamination Certificate

active

07470374

ABSTRACT:
A manufacturing method of a magnetic recording medium, and the like are provided, which can suppress misalignment of a processed shape of divided recording elements and magnetic degradation and can efficiently manufacture a magnetic recording medium having good magnetic characteristics. In the manufacturing method, ion beam etching is used as a dry etching technique for a continuous recording layer20. Before dry etching of the continuous recording layer20, a resist layer26is removed. As the material for a first mask layer covering the continuous recording layer, diamond like carbon is used.

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