Manufacturing apparatus, processing method and device...

Details Manufacturing apparatus, processing method and device... Manufacturing apparatus, processing method and device...

2008-07-22

2008-07-22

Kosowski, Alexander J (Department: 2128)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S097000, C700S121000

Reexamination Certificate

active

11442936

ABSTRACT:
A semiconductor manufacturing apparatus which processes a lot in accordance with the content of a queue table in which a process of a lot is reserved includes a volatile memory configured to store the queue table, and a controller configured to store, in a nonvolatile memory, the content of the queue table stored in the volatile memory.

REFERENCES:
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patent: 5596502 (1997-01-01), Koski et al.
patent: 6216051 (2001-04-01), Hager et al.
patent: 7043322 (2006-05-01), Denton et al.
patent: 7216222 (2007-05-01), Holzmann
patent: 2002/0159567 (2002-10-01), Sako et al.
patent: 2005/0097288 (2005-05-01), Holzmann
patent: 2005/0172093 (2005-08-01), Jain
patent: 2002-217098 (2002-08-01), None

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