Manufacturing a liquid ejection device

Etching a substrate: processes – Forming or treating thermal ink jet article

Reexamination Certificate

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Details

C216S002000, C438S021000, C347S054000, C347S065000

Reexamination Certificate

active

06969473

ABSTRACT:
A method of manufacturing a liquid ejection device, the device including a movable paddle, the method utilizing semiconductor fabrication techniques and including the steps of depositing a first layer of sacrificial material on a substrate, depositing at least a second layer of sacrificial material on a selected part or parts of the first layer, depositing a paddle forming layer of material over the first and second layers of sacrificial material and etching the sacrificial material to thereby form a paddle coupled to a substrate.

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