Manufacture of silicon on the inside of a tube

Details Manufacture of silicon on the inside of a tube Manufacture of silicon on the inside of a tube

1977-09-12

1978-11-07

Silverberg, Sam

Coating apparatus

With cutting, punching or tearing of work

Web or sheet work

427 51, 427 86, 427248A, 427237, C23C 1308

Patent

active

041239890

ABSTRACT:
A new method and apparatus for producing silicon are disclosed which are characterized by using a silicon tube as the reaction chamber and disproportionating a gaseous silicon compound so as to produce silicon and deposit the same on the inner surface of the reaction chamber.

REFERENCES:
patent: 3178308 (1965-04-01), Oxley
patent: 3748169 (1973-07-01), Keller
patent: 3783009 (1974-01-01), Tramposch
patent: 3862020 (1975-01-01), Woerner
patent: 3865647 (1975-02-01), Reuschel
patent: 4007074 (1977-02-01), Ogirima

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