Manufacture of semiconductor devices

Details Manufacture of semiconductor devices Manufacture of semiconductor devices

1971-07-29

1978-12-26

Tung, T.

Chemistry: electrical and wave energy

Processes and products

Electrostatic field or electrical discharge

219 69R, C25F 312

Patent

active

041315243

ABSTRACT:
A method of manufacturing a semiconductor device comprising the steps of providing a plate-shaped semiconductor body, removing by spark erosion a first portion of the semiconductor body, and then using a selective etching process to remove only a second portion of the semiconductor body.

REFERENCES:
patent: 2994811 (1961-08-01), Senitzky
patent: 3230763 (1966-01-01), Frantzis
patent: 3492513 (1970-01-01), Hollander et al.
patent: 3616345 (1971-10-01), Van Dijk
patent: 3616348 (1971-10-01), Greig

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