Manufacture of planar waveguides using sol-gel techniques

Glass manufacturing – Processes of manufacturing fibers – filaments – or preforms – Process of manufacturing optical fibers – waveguides – or...

Reexamination Certificate

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C065S017200, C065S395000, C065S398000, C065S440000

Reexamination Certificate

active

10196678

ABSTRACT:
Silica sol techniques are described for making thick silica or silica based films useful for planar optical waveguides. The process involves coating of a colloidal silica sol onto a substrate, drying the sol, and consolidating the dried sol to form the planar waveguide. Coating is performed in a simple operation, either by dipping, or preferably by spin coating. In a preferred embodiment the substrate is coated with a wetting agent prior to spin coating. It is found that the wetting agent substantially improves the thickness uniformity of the layer.Thick waveguide layers may be produced by repeating the coating process one or more times to produce a layer with the desired thickness. Buried waveguides are produced by forming a doped core layer, patterning the doped core layer and using the coating technique of the invention to form the cladding material.

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patent: 1167308 (2002-01-01), None
Orignac et al., “Silica-based sol-gel optical waveguides on silicon,” IEE Proc.-Optoelectron., vol. 143, No. 5, Oct. 1996, p. 287-292.
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Jones et al., Silicon-Containing Polymers—The Science and Technology of Their Synthesis and Applications, Copyright 2000, p. 224.
Forastiere et al., “Strip-Loaded Sol-Gel Waveguides: Design and Fabrication,” Fiber and Integrated Optics, 20:29-43, Copyright 2001, p. 29-43.
Syms et al., “Low loss achieved in sol-gel based silica-on-silicon integrated optics using borophosphosilicate glass,” Electronic Letters, vol. 31, No. 21, Oct. 12, 1995, p. 1833-1834.

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