Manufacture of photovoltaic devices

Details Manufacture of photovoltaic devices Manufacture of photovoltaic devices

2006-08-03

2011-10-04

Blum, David S (Department: 2813)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C257SE21001

Reexamination Certificate

active

08030121

ABSTRACT:
A method and apparatus for depositing a film on a substrate includes subjecting material to an energy beam.

REFERENCES:
patent: 4909184 (1990-03-01), Fujiyama
patent: 5480494 (1996-01-01), Inoue
patent: 6534704 (2003-03-01), Hashimoto et al.
patent: 6660538 (2003-12-01), Delahoy
patent: 7449629 (2008-11-01), Ferri et al.
patent: 2006/0005874 (2006-01-01), Ferri et al.
patent: 2007/0012353 (2007-01-01), Fischer et al.
John L Vossen, Thin Film Processes II 1991, Academic Press pp. 100-106.
John L Vossen Thin Film Processes II 1991 Academic Press pp. 444-453.
S. Kumar et al. Rapid Thermal Annealing of Cu-In/Se Stacked Layers Semiconductor Sci. Technol. 1991, pp. 940-941.

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