Manufacture of micro mirror balls and circumscribing...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C156S145000, C156S154000, C264S001900, C345S107000

Reexamination Certificate

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07486431

ABSTRACT:
Method and apparatus are presented for the mass production manufacturing of planar mirrors inside transparent micro balls circumscribed by lubricated bearings for solar energy concentration and related applications such as optical switches, etc. These bearings permit rotational alignment of the balls with minimal friction. The preferred mass production process utilizes photolithography in an optical microlithographic photoresist process. The micro-balls are in the size range of ˜1 micron (1×10-6 m) to 1000 microns (1 mm). The micro-balls vary in geometry from spheres to cylinders to oblate ellipsoids to disks. The term “elements” is used to encompass all these shapes, which have one thing in common—a flat specularly reflecting mirrored surface. An important aspect of the manufacturing process is the containment of the mirrored micro-balls in the interior of lubricated bearings which are preferably concentric with the balls, which circumscribed concentricity can also be preferably accomplished by a microlithographic process.

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