Manufacture of micro electron emitter

Details Manufacture of micro electron emitter Manufacture of micro electron emitter

1995-10-18

1997-02-04

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

1566281, 1566441, 1566561, 1566571, 1566621, 445 24, 445 50, 445 51, H01J 116

Patent

active

055997490

ABSTRACT:
A method of manufacturing an electric field emission type device. A recess having a tapered surface at an upper portion of the recess is provided. A sacrificial film is deposited on the substrate with the tapered recess. A sharp cusp is therefore formed on the surface of the sacrificial film over the recess. An electron emitting material film is deposited on the sacrificial film to form a fine emitter with a sharp tip. This fine emitter is exposed by etching and removing unnecessary regions under the fine emitter. This manufacturing method realizes a high performance electric field emission type device having an emitter tip with a small radius of curvature and a small apex angle.

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