Manufacture of masks and electronic parts

Details Manufacture of masks and electronic parts Manufacture of masks and electronic parts

2006-04-11

2006-04-11

Vinh, Lan (Department: 1765)

Semiconductor device manufacturing: process

Chemical etching

Liquid phase etching

C438S750000, C216S016000, C430S312000

Reexamination Certificate

active

07026254

ABSTRACT:
A precursor that may be imaged by heat is made up of a substrate, for example a copper board, and a composite layer structure composed of two layers. Preferably, the first layer is composed of an aqueous developable polymer mixture containing a photothermal conversion material, which is contiguous to the substrate. The second layer of the composite is composed of one or more non-aqueous soluble polymers, which are soluble or dispersible in a solvent which does not dissolve the first layer. The precursor is exposed with an infrared laser or a thermal print head, and upon aqueous development, the exposed regions are removed, revealing regions of the substrate surface able to be etched or otherwise treated. The second layer may also contain a photothermal conversion material. Alternatively, the composite layer may be free of photothermal conversion material when thermal imaging is carried out using a thermal print head. The precursor may be used, for example, as a mask precursor or electronic part precursor.

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