Manufacture of integrated optical waveguides

Glass manufacturing – Processes – Forming product or preform from molten glass

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65 182, 427163, 427167, 4274196, C03B 37027

Patent

active

046196803

ABSTRACT:
Integrated optical waveguides, for example planar waveguides with stripes of guiding material formed integrally on a substrate, are manufactured by depositing the doped glass guiding material by plasma chemical vapor deposition. Several substrates can be arranged in a suitably shaped apparatus so that deposition can take place on all of them at once.

REFERENCES:
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patent: 4341541 (1982-07-01), Dabby et al.
patent: 4345928 (1982-08-01), Kawachi et al.
patent: 4367085 (1983-01-01), Suto et al.
patent: 4425146 (1984-01-01), Izawa et al.
patent: 4494968 (1985-01-01), Bhagavatula et al.

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