Radiation imagery chemistry: process – composition – or product th – Holographic process – composition – or product
Patent
1987-06-26
1989-08-15
Dees, Jose G.
Radiation imagery chemistry: process, composition, or product th
Holographic process, composition, or product
430 2, 430311, 430319, 430327, 430394, 430396, 430397, 350 367, 350 369, 350 38, 350383, G02B 120, G03H 104
Patent
active
048574252
ABSTRACT:
A method of manufacturing integrated circuits using holographic techniques by interference between an input beam and a reference beam generated from laser sources. A holographic image of the object formed on a mask window, is formed on recording emulsion coated on a glass slab by means of interference between the input beam which has passed through the mask and the reference beam which is reflected from the surface of a prism in contact with the glass slab. In order to reproduce the holographic image on a silicon slice which replaces the mask, the reference beam is replayed in the reverse direction through the prism such that the interference between the input beam and the replayed reference beam causes the holographic image to be created as a real image in the silicon slice.
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Paper by K. A. Stetson in Applied Physics Letters (Oct. 1st, 1967) entitled "Holography With Total Internally Reflected Light".
Dees Jos,e G.
Holtronic Technologies Limited
Loney Donald J.
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