Manufacture of hollow CVD silicon nitride articles

Details Manufacture of hollow CVD silicon nitride articles Manufacture of hollow CVD silicon nitride articles

1982-03-19

1985-02-19

Morgenstern, Norman

Plastic and nonmetallic article shaping or treating: processes

Gas or vapor deposition of article forming material onto...

427227, 4272552, 427289, B29C 1300

Patent

active

045004838

ABSTRACT:
The process of making an article of chemically vapor deposited silicon nitride on a pattern at high temperature including the use of methane to reduce the grain size of the deposited compound.

REFERENCES:
patent: 3226194 (1965-12-01), Kuntz
patent: 3565674 (1971-02-01), Boland et al.
patent: 4035460 (1977-07-01), Dietz et al.
patent: 4036653 (1977-07-01), Jacobson
patent: 4289801 (1981-09-01), Galasso et al.

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