Manufacture of field emission element with short circuit prevent

Details Manufacture of field emission element with short circuit prevent Manufacture of field emission element with short circuit prevent

1999-04-13

2000-06-13

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 50, H01J 902

Patent

active

06074264&

ABSTRACT:
A method of manufacturing a field emission element includes the steps of: forming a conductive gate electrode film on a substrate; forming an insulating film on the gate electrode film; forming a hole in the insulating film and the gate electrode through etching by using a resist pattern as a mask; forming a first sacrificial film covering the insulating film and the substrate; etching back the first sacrificial film to leave a side spacer on the side wall of the hole of the gate electrode forming a second sacrificial film covering and the substrate; forming a conductive emitter electrode on the second sacrificial film; and removing a portion of the second sacrificial film to expose at least a portion of the emitter electrode film and a portion of the gate electrode film.

REFERENCES:
patent: 5599749 (1997-02-01), Hattori
patent: 5603649 (1997-02-01), Zimmerman
patent: 5720641 (1998-02-01), Hattori
patent: 5720642 (1998-02-01), Hattori
patent: 5795208 (1998-08-01), Hattori
patent: 5839934 (1998-11-01), Hattori

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