Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Patent
1996-08-20
1998-11-24
Ramsey, Kenneth J.
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
H01J 902
Patent
active
058399348
ABSTRACT:
A first polysilicon film is deposited on a substrate and selectively etched to form a gate opening having a vertical side wall. Next, a second polysilicon film is deposited and anisotropically etched to form a side spacer on the side wall of the gate opening. The exposed surface of the first polysilicon and side spacer is oxidized to form a silicon oxide film having a cusp with a sharp edge over the gate opening. Thereafter, an emitter electrode material film is formed on the silicon oxide film to form a tip of a field emission emitter in the cusp. Lastly, the silicon oxide film around the field emission emitter is removed. A method of manufacturing a field emission type element of high performance is provided in which a field emission emitter having a small radius of curvature and small apex angle of the emitter tip is formed in self-alignment with a small diameter gate opening.
REFERENCES:
patent: 5141459 (1992-08-01), Zimmerman
patent: 5203731 (1993-04-01), Zimmerman
patent: 5334908 (1994-08-01), Zimmerman
patent: 5720641 (1998-02-01), Hattori
Ramsey Kenneth J.
Yamaha Corporation
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