Manufacture of electron emitter by replica technique

Details Manufacture of electron emitter by replica technique Manufacture of electron emitter by replica technique

1995-10-06

1998-08-18

Bradley, P. Austin

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

445 24, H01J 902, H01J 130

Patent

active

057952086

ABSTRACT:
A method of manufacturing a microelectronic device includes the steps of: (a) providing a hole in a substrate; (b) forming a first sacrificial film having a slanted side surface on a side wall of the hole; (c) applying a second sacrificial film on the first sacrificial film to fill the hole and form a cusp; (d) forming an electron emitting material layer capable of emitting electrons therefrom under an electric field on the second sacrificial film to fill the cusp to form a tip; and (e) removing the first and second sacrificial films to expose the tip. This method enables to manufacture an electric field emission type device having an emitter tip with a small radius of curvature and small apex angle.

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