Manufacture of a group of infra-red detector elements, and a gro

Details Manufacture of a group of infra-red detector elements, and a gro Manufacture of a group of infra-red detector elements, and a gro

1979-07-23

1982-01-12

Pianalto, Bernard D.

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

156630, 156632, 156633, 156655, 204192E, 428332, 428689, B32B 300

Patent

active

043105831

ABSTRACT:
A group of infra-red radiation detector elements are manufactured from a body (21) of infra-red sensitive materials on an insulating substrate (22) using two masking steps which do not require critical alignment even with close spacing between the elements. A first masking layer (24; see FIG. 10) e.g. of photoresist is formed on the upper surface of at least the body (21) to determine by a lift-off technique a metallization pattern (35, 36; see FIG. 13) on the body (21) and the substrate (22). A second masking layer (44) e.g. of photoresist is then provided to determine by ion-bombardment through windows (45) of this layer (44) the desired pattern of elements and their electrodes. The ion-bombardment permits removal of exposed areas of not just the body (21) and metallization pattern (35, 36) but also of a passivating layer on the body surfaces; a closely spaced group of elements and their electrodes can be obtained because the ion-bombardment results in steep sides without significant undercutting.

REFERENCES:
patent: 4128467 (1978-05-01), Fischer

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