Material or article handling – Load carried along a horizontal linear path – Carried via magnetic floating
Patent
1984-06-21
1986-08-05
Valenza, Joseph E.
Material or article handling
Load carried along a horizontal linear path
Carried via magnetic floating
74 8915, 901 16, 248651, 248657, B65G 2500
Patent
active
046040277
ABSTRACT:
Apparatus (11), which includes two adjacent wafer treating facilities (21 and 22), features an overhead positioning mechanism (20), the operation of which is controlled by a control module (48) to handle articles, such as semiconductor wafers (16), in a plurality of sequential plating operations. The vertical movement of a manipulator extension (46) is controlled with a relatively greater degree of precision to protect the wafers from becoming damaged. In the horizontal direction, a traveling frame (106) steadies a lead screw (59) spanning an extended distance between the two facilities (21 and 22) to support a precise movement of the manipulator extension (46) with respect to both of the facilities.
REFERENCES:
patent: 2654165 (1953-10-01), Lichtenberg
patent: 3734303 (1973-05-01), Blatt
patent: 3884363 (1975-05-01), Ajlouny
patent: 4466770 (1984-08-01), Peroutky
Becker Alan R.
McCorkle Richard A.
Miller Robert A.
Plessl Gary J.
AT&T - Technologies, Inc.
Fox James H.
Schellin W. O.
Valenza Joseph E.
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