Manipulator needle portion repairing method

Details Manipulator needle portion repairing method Manipulator needle portion repairing method

2008-04-15

2008-04-15

Cozart, Jermie E. (Department: 3726)

Metal working

Method of mechanical manufacture

Repairing

C029S402090, C029S402180, C029S458000, C029S557000, C427S142000, C163S005000

Reexamination Certificate

active

10973796

ABSTRACT:
In a manipulator needle portion defect repairing method, the existence of an abrasion or a fracture in a needle portion for holding a sample at an end of a manipulator disposed in an FIB device is confirmed using a microscope function of the FIB device. The abrasion or the fracture in the needle portion is then repaired by chemical vapor deposition using a focused ion beam of the FIB device.

REFERENCES:
patent: 4562332 (1985-12-01), Walter et al.
patent: 5630268 (1997-05-01), Smith et al.
patent: 5683547 (1997-11-01), Azuma et al.
patent: 2004/0063100 (2004-04-01), Wang

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