Material or article handling – Load carried along a horizontal linear path – Carried via magnetic floating
Patent
1988-02-16
1989-01-10
Spar, Robert J.
Material or article handling
Load carried along a horizontal linear path
Carried via magnetic floating
901 17, 74479, B65G 5400
Patent
active
047970537
ABSTRACT:
A manipulator for vacuum applications, e.g., for positioning of a specimen at a required point in a vacuum chamber (20) where the specimen can be subjected to ion implantation or similar treatment or measuring procedures, comprises an adjustable angular connector (12) which is formed by two skewed rings (32) and (36) which slide one over another. When the rings rotate, the end of drive shaft (72) describes a planetary path along a circle. The drive shaft (72) has one end connected to a rotary drive mechanism (14) and another end to a driven shaft (92) through a universal joint (90). The lower end of the driven shaft is installed in a rotating manner in a slide (87). The slide (87) is guided in one direction along another slide (84) which in turn is guided in a direction perpendicular to the first one along a rigid frame (80). Planetary motion of driven shaft (92) causes linear motions of the slides (84, 87) in mutually perpendicular directions. As a result, the second slide (87), which carries a sample holder (18), can be installed in any required position within an orthogonal system of coordinates. In addition, the sample holder is rotated from the above-mentioned rotary drive mechanism. The manipulator moves the sample holder with high accuracy since the slide (84) is guided in the rigid frame (80).
REFERENCES:
patent: 2973107 (1961-02-01), Cherel
patent: 3426920 (1969-02-01), Chesley
patent: 4300362 (1981-11-01), Lande et al.
Huntington Mechanical Laboratories, Inc.
Pressman David
Spar Robert J.
Underwood Donald W.
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