Manifold systems for high purity chemical delivery systems

Fluent material handling – with receiver or receiver coacting mea – Filling or refilling of dispensers – By operation of means causing or controlling dispensing

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Details

141 67, 141 91, 141 63, 137209, F17C 1300

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active

055906958

ABSTRACT:
A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

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