Manifold systems for high purity chemical delivery systems

Details Manifold systems for high purity chemical delivery systems Manifold systems for high purity chemical delivery systems

1995-06-07

1997-01-07

Jacyna, J. Casimer

Fluent material handling, with receiver or receiver coacting mea

Filling or refilling of dispensers

By operation of means causing or controlling dispensing

141 67, 141 91, 141 63, 137209, F17C 1300

Patent

active

055906958

ABSTRACT:
A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.

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