Fluid handling – Self-proportioning or correlating systems – Self-proportioning flow systems
Patent
1987-08-28
1989-09-26
Hepperle, Stephen M.
Fluid handling
Self-proportioning or correlating systems
Self-proportioning flow systems
137594, 137606, G05D 1102, F16K 1106
Patent
active
048692840
DESCRIPTION:
BRIEF SUMMARY
The present invention relates to manifold assemblies and more particularly to manifolds to achieve mixing of fluids.
The mixing of fluids such as liquids or gases is required to be achieved with a high degree of accuracy in a wide variety of situations such as semi-conductor device fabrication and it is often necessary that reactive components must be mixed with an inert carrier to produce a solution or gaseous mixture of the required concentration before reaction.
Previously manifolds have had large dead-space or unflushed volumes causing problems with overshooting and other anomalies in composition. Also problems have been encountered in releasing reagents in the reactor simultaneously and in handling incompatible materials in tandem. A particular problem with linear manifolds is that reagents switched at the same time arrive in the reactor at different times causing compositional transients.
According to the present invention there is provided a manifold assembly comprising a manifold body first and second inlet ports, an outlet nozzle and a plurality of valves, the manifold body comprising at least two substantially isolated duct systems a first of which leads from the first inlet port to the outlet nozzle and a second of which leads from the second inlet port to the outlet nozzle, the inlet ports having respective substantially concentric channels leading to the respective duct systems and the outlet nozzle having substantially concentric tubes leading from the respective duct systems, the plurality of valves being arranged in sets, one set for each duct system, radially mounted about the manifold body with a reagent outlet of each valve connected to at least one duct of one of the duct systems wherein the duct lengths from each valve in the same valve set to the output nozzle are substantially the same and a carrier fluid flowing from the inlet ports through the duct systems will pick up any reagent released by a valve in the respective valve sets for delivery to the output nozzle.
Preferably, the isolated duct systems will be arranged to promote mixing of the carrier fluid and any added reagent. The duct systems may have sharp bends and constrictions accordingly.
Preferably, the rate of carrier fluid flow will be kept constant allowing accurate control of composition. The pressures of carrier fluids in respective duct systems may be balanced by a control system. Also the pressure of the carrier fluid about the valves may be regulated by a further control system.
Preferably, if the valves have an unflushed volume it will be as small as possible.
An embodiment of the present manifold assembly will now be described by way of example only with reference to the accompanying drawings in which:
FIG. 1 shows a plan cross-section of a manifold assembly according to the present invention;
FIG. 2 shows an end view of the manifold shown in FIG. 1;
FIG. 3 illustrates a valve, which may be used in the manifold assembly shown in FIG. 1, in an open state;
FIG. 4 shows the valve of FIG. 3 in a closed state;
FIG. 5 shows a system to regulate carrier fluid pressures in the manifold of FIG. 1; and,
FIG. 6 illustrates a system to regulate carrier fluid and valve vent pressures in the manifold of FIG. 1.
Referring to FIG. 1, a manifold body 1 has two independent duct systems (respectively indicated by single and double-headed arrows) connecting two separate valve sets (eg. 3 and 4, 5 and 6), a concentric input port 7 and a reaction vessel 9. The first duct system starts with a centre channel 10 of the concentric input port 7 and comprises a first central duct 11 leading to branch arms 13 distributing a portion of a carrier fluid flow 15 in the system to output ports 17 of each of a first valve set collecting any reagent released before outputing the carrier fluid and any reagent input from the valves to the reaction vessel 9. The second duct system begins with the outer channel 19 of the concentric input port 7 which leads to ducts 21 connected to output ports 23 of each valve 3 or 4 of a second valve set allowing a carr
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IBM Technical Disclosure Bulletin, vol. 8, No. 7, Dec. 1965, p. 975, "Three-Way Valve with No Cross-Over Loss".
Davies Richard
Scott Darak M.
Cryogenic and Vacuum Technology Limited
Hepperle Stephen M.
Plessey Overseas Limited
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