Fishing – trapping – and vermin destroying
Patent
1987-01-29
1988-07-05
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437193, 437195, 148DIG150, H01L 21441
Patent
active
047554827
ABSTRACT:
A method is disclosed for the manufacture of a multilayered interconnect structure on an insulating substrate. First and second conductive layers are formed on one and on the other (reverse) surfaces, respectively, of the insulating substrate. An insulating layer is formed, by means of a plasma CVD method, on the surface of the insulating substrate, to electrical insulation between interconnect layers. This is followed by a reactive ion etching step. This results in the formation of the aforementioned layer of a uniform thickness and having a uniform etching rate. That is, with the conductive layer formed on the rear surface of the insulating substrate, the complete insulating substrate is placed at the same potential level, whereby a uniform electrochemical reaction occurs on the surface thereof, resulting in the formation of the layers having a uniform etching rate, and in the formation of these layers each having the same thickness.
REFERENCES:
patent: 4428111 (1984-01-01), Swartz
patent: 4564997 (1986-01-01), Matsuo et al.
patent: 4598461 (1986-07-01), Love
patent: 4644637 (1987-02-01), Temple
Chaudhuri Olik
Kabushiki Kaisha Toshiba
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