Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1987-08-14
1990-07-17
Morgenstern, Norman
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
118726, B05D 306, C23C 1600
Patent
active
049420577
ABSTRACT:
Amorphous layers are made by decomposing one or several gaseous compounds which include an element or elements to be deposited. These are group 3 and 5 or group 4 elements but amorphous layers of other metals can also be made. The compound is added in a small concentration to a hot gas, preferably hydrogen, helium or argon and a diffusor accelerates the mixture while molecular clusters of the element or elements are formed and impinge upon a target for depositing thereon.
REFERENCES:
patent: 4152478 (1979-05-01), Takagi
patent: 4197814 (1980-04-01), Takagi et al.
patent: 4328257 (1982-05-01), Muehlberger et al.
patent: 4559096 (1985-12-01), Friedman et al.
patent: 4582731 (1986-04-01), Smith
patent: 4624859 (1986-11-01), Akira et al.
patent: 4668480 (1987-05-01), Fujiyashu et al.
patent: 4724106 (1988-02-01), Morimoto et al.
patent: 4740267 (1988-04-01), Knauer et al.
patent: 4799454 (1989-01-01), Ito
patent: 4811690 (1989-03-01), Kawagoe et al.
patent: 4812326 (1989-03-01), Tsukazaki et al.
patent: 4856457 (1989-08-01), Knauer
Hauser Manfred
Hoeschele Joerg
Steinwandel Juergen
Dornier System GmbH
Morgenstern Norman
Padgett Marianne L.
Siegemund Ralf H.
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