Make-up air handler and method for supplying boron-free outside

Details Make-up air handler and method for supplying boron-free outside Make-up air handler and method for supplying boron-free outside

1998-06-18

2000-08-15

Simmons, David A.

Gas separation

Combined or convertible

In environmental air enclosure

553851, 55485, 55486, 55497, 55DIG18, B08B 1502

Patent

active

061029777

ABSTRACT:
A make-up air handler for supplying outside air to clean environments such as clean rooms in semiconductor fabrication facilities includes a flow passage through which the outside air is passed. At least one filter is disposed to filter the outside air passing through the flow passage. The make-up air handler preferably includes all boron-free filters to prevent the introduction of boron into the outside air by the filters. The make-up air handler can include boron-free ULPA filters to provide highly clean boron-free outside air for supplying to clean environments. The make-up air handler can be operated in a normal manner at air velocities exceeding the rated velocities of the ULPA filters, without subjecting the ULPA filters to air velocities exceeding their ratings, due to the configuration and arrangement of the ULPA filters in the flow passage. Accordingly, highly clean outside air can be provided at normal volumetric flow rates without high energy losses associated with above-rated velocity air flows through the ULPA filters.

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