Magnification correction for small field scanning

Details Magnification correction for small field scanning Magnification correction for small field scanning

1996-08-02

1998-07-14

Nelms, David C.

Optical: systems and elements

Lens

With field curvature shaping

359650, 359651, 359364, 359683, 396430, G02B 300, G02B 1700, G02B 1514

Patent

active

057813469

ABSTRACT:
Magnification correction for small field scanning of large blanks is provided by adding magnification adjusting elements (lenses) to a double pass Wynne-Dyson lens or other type of one-to-one projection lens. The magnification adjusting optical elements includes two pairs of low power lenses, one associated with each of the input and output prisms of a Wynne-Dyson lens. Movement of the magnification adjusting optics provides positive or negative magnification as needed to correct for any expansion or compaction of the blank relative to the reticle (mask) and hence maintain alignment. Further magnification correction is provided by a small velocity relative movement between the reticle and the blank by means of a secondary stage in the scan direction. This corrects for any alignment error in the scan direction and may be used independently of the optical correction technique with any type of projection lens.

REFERENCES:
patent: 3909834 (1975-09-01), Sanada et al.
patent: 5557469 (1996-09-01), Markle et al.
patent: 5559629 (1996-09-01), Sheets et al.
Goodall, F., et al., "Excimer Lasers As Deep UV Sources for Photolithographic System", Microelectronic Engineering, 5:445-452 (1986).

Affiliated with

Also associated with

Rating

Magnification correction for small field scanning does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Magnification correction for small field scanning, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Magnification correction for small field scanning will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1888330