Magnetron plasma reactor

Details Magnetron plasma reactor Magnetron plasma reactor

1985-08-23

1986-11-18

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118728, 118 501, 118620, 156643, 156646, 156656, 204298, 20419232, C23F 102, B44C 122, C03C 1500, H01L 21306

Patent

active

046234179

ABSTRACT:
A magnetron plasma reactor wherein the susceptor is an aluminum arm extending into approximately the middle of a solenoidal magnetic field generated by a dc current.

REFERENCES:
patent: 4422896 (1983-12-01), Class et al.
patent: 4483737 (1984-11-01), Mantei
patent: 4572759 (1986-02-01), Benzing
patent: 4581118 (1986-04-01), Class et al.

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