Magnetron cathode

Details Magnetron cathode Magnetron cathode

1992-04-03

1996-07-30

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429811, 20429812, 20419212, C23C 1434

Patent

active

055408230

ABSTRACT:
A magnetron cathode for a cathode sputtering system has a target holder for holding a target 9 where the erosion zone is opposite the substrate. The non-sputtering target surfaces 9a are covered with a barrier layer or protective layer 21.

REFERENCES:
patent: 4169031 (1979-09-01), Brors
patent: 4200510 (1980-04-01), O'Connell et al.
patent: 4407707 (1983-10-01), Landau
patent: 4434042 (1984-02-01), Keith
patent: 4448653 (1984-05-01), Wegmann
patent: 4486287 (1984-12-01), Fournier
patent: 4500409 (1985-02-01), Boys et al.
patent: 4515675 (1985-05-01), Kieser et al.
patent: 4747927 (1988-05-01), Rille et al.
patent: 4933064 (1990-06-01), Geisler et al.

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