Wave transmission lines and networks – Resonators – Magnetic type
Patent
1998-12-29
2000-07-18
Ham, Seungsook
Wave transmission lines and networks
Resonators
Magnetic type
333245, H01P 700
Patent
active
060913134
ABSTRACT:
For patterning a magnetic garnet layer formed on the surface of a non-magnetic garnet substrate, the magnetic garnet layer, an intermediate layer and a resist layer are formed in this order from the substrate side, the intermediate layer and the resist layer are shaped in the state of an island, and then the magnetic garnet layer is etched in a hot phosphoric acid solution, the intermediate layer being composed of a material which is more soluble in the hot phosphoric acid solution than the resist layer so that the etched magnetic garnet layer side face is formed as a gently inclined face and that a conductor pattern extending on both the non-magnetic garnet substrate and magnetic garnet layer surfaces can be formed without breaking, or a protective resist layer being formed on the reverse surface of the substrate so that the application angle of a magnetic field to the magnetic garnet layer surface can be accurately controlled.
REFERENCES:
patent: 4060448 (1977-11-01), Nemiroff et al.
patent: 5191308 (1993-03-01), Tsutsumi et al.
patent: 5192928 (1993-03-01), Murakami et al.
Ham Seungsook
TDK Corporation
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