Measuring and testing – Dynamometers – Responsive to multiple loads or load components
Reexamination Certificate
2006-07-11
2006-07-11
Noori, Max (Department: 2855)
Measuring and testing
Dynamometers
Responsive to multiple loads or load components
Reexamination Certificate
active
07073397
ABSTRACT:
The invention provides an apparatus for sensing pressure that comprises a substrate and a sensor formed on the substrate. The sensor is adapted to sense pressure applied thereto and includes a support structure smaller than the substrate to result in a cavity above a portion of the substrate and a magnetoresistive sensor formed over the support structure. The magnetoresistive element provides high sensitivity to pressure while maintaining miniaturized dimensions.
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Fidelica Microsystems Inc.
Noori Max
Pillsbury Winthrop Shaw & Pittman LLP
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